|
妯℃摤閲戝爆瀵嗗皝;
娴侀噺鑼冨湇:10 sccm-5 slm;
绮惧害:≤±1% FS ;
鏈€澶ч€�(j矛n)姘ｅ鍔�:140 psi(981 kPa)
缇庡湅(gu贸)Aera FC-7700绯诲垪璩�(zh矛)閲忔祦閲忚▓(j矛)
鍎�(y艒u)榛�(di菐n)锛�
楂樻€у児(ji脿)姣�
闊挎噳(y墨ng)閫熷害蹇細灏忎簬2绉�
鐒�(w煤)鑸囧€瘮鐨勫彲闈犳€э細浣跨敤涓€骞翠互涓�锛岄浂榛�(di菐n)婕傜Щ灏忎簬婊块噺绋嬬殑0.5%
鏄撲簬闆嗘垚锛氭(bi膩o)婧�(zh菙n)鎺ラ牠鍜屽昂瀵�
鍑虹溇鐨勬晥鏋滐細楂樺搧璩�(zh矛)鑶滃堡鑸囪潟鍒荤壒鎬�
鐗规€�
闈為噾灞瘑灏�
VCR閫ｆ帴
閲忕▼鑼冨湇寰�10SCCM鍒�150SLM
甯搁枆鎴栧父闁嬪紡闆荤闁�
鍏佽ū鏈€澶ф竻娲楁祦閲忥細楂橀仈(d谩)鏈€澶ф牎婧�(zh菙n)鍊肩殑100鍊�
婕忕巼1×10-6 atm-cc/绉�(姘�)
FC-7700姘ｉ珨璩�(zh矛)閲忔祦閲忚▓(j矛)鐨勮┏绱�(x矛)璩囨枡锛�
Adcanced Energy 鐨凙era FC-7700绯诲垪鐢�(ch菐n)鍝佹槸瀵�(sh铆)韪愰(y脿n)璀夌殑閬╃敤澶氱ó鎳�(y墨ng)鐢ㄧ殑鍫�(ch菐ng)鍚堢殑妯�(bi膩o)婧�(zh菙n)鐢�(ch菐n)鍝�锛岃┎娴侀噺瑷�(j矛)閲囩敤闈為噾灞瘑灏�锛屾祦閲忔帶鍒剁簿纰�锛屾€у児(ji脿)姣旈珮銆傝┎鐢�(ch菐n)鍝佸皥鐐哄緸妤�(y猫)浜庡崐灏�(d菐o)楂�銆佸钩鏉块’绀�銆佹暩(sh霉)鎿�(j霉)瀛樺劜(ch菙)銆佸伐妤�(y猫)鐪熺┖鍜屽伐妤�(y猫)閸嶈啘甯傚牬(ch菐ng)鐨勫伐钘濆拰瑷�(sh猫)鍌欏伐绋嬪斧瑷�(sh猫)瑷�(j矛)锛屽悓鏅�(sh铆)锛岃┎绯诲垪鐢�(ch菐n)鍝佸湪CVD銆丳VD銆佽潟鍒�銆侀洟瀛愭敞鍏ャ€佹亢灏�銆佺啽姘у寲銆佸厜瀛�(xu茅)鐜荤拑閸嶈啘銆佸厜绾�銆佽〃闈㈣檿鐞嗕互鍙婂叾瀹冮崓鑶滃伐钘濈瓑鑵愯潟鎬ф埃楂旀噳(y墨ng)鐢ㄩ牁(l菒ng)鍩熻〃鐝�(xi脿n)鍑鸿壇濂界殑鍙潬鎬у拰鍎�(y艒u)鐣扮殑鎬ц兘銆�
鎬у児(ji脿)姣旈珮锛�
FC-7700绯诲垪鐢�(ch菐n)鍝佸皥鐐洪偅浜涜姹傞爞妤垫€ц兘锛屼絾涓嶈姹傚叿鏈夎€愯厫铦曟€ф垨楂樻紡鐜囪姹傜殑鎳�(y墨ng)鐢ㄨ€屽畾鍒讹紝涓嶅儏鎬у児(ji脿)姣斿ソ锛岃€屼笖鎺у埗绮惧害闈炲父楂�銆�
闊挎噳(y墨ng)閫熷害蹇細
FC-7700绯诲垪鐢�(ch菐n)鍝侀噰鐢ㄦ渶鏂版妧琛�(sh霉)瑷�(sh猫)瑷�(j矛)锛屽伐浣滄€ц兘閬�(yu菐n)閬�(yu菐n)鍎�(y艒u)浜庡悓椤炶唱(zh矛)閲忔祦閲忔帶鍒跺櫒MFC.鍏跺厛閫�(j矛n)涔嬭檿鍖呮嫭锛氶噰鐢ㄤ簡涓€绋晱鎰熸€у挤(qi谩ng)銆侀熆鎳�(y墨ng)閫熷害蹇殑灏忕洿寰戝偝鎰熷櫒銆傚彟澶栵紝鑸囬噰鐢ㄤ綆閫熺啽鏁忛枼鐨勫悓椤炵敘(ch菐n)鍝佺浉姣�锛孎(xi脿n)C-7700绯诲垪鐢�(ch菐n)鍝侀噰鐢ㄥ父闁嬫垨甯搁枆寮忛浕纾侀枼锛屽叿鏈夎純蹇殑闊挎噳(y墨ng)閫熷害銆傛彁楂橀熆鎳�(y墨ng)閫熷害涔嬪悗锛岄伩鍏嶄簡鍑虹従(xi脿n)閬�(gu貌)娌栵紝閬�(d谩)鍒拌ō(sh猫)瀹氶粸(di菐n)鐨勬檪(sh铆)闁撲笉鍒�2绉掞紞锛嶅湪鎵€鏈夊付妯�(bi膩o)婧�(zh菙n)闆荤闁ョ殑璩�(zh矛)閲忔祦閲忔帶鍒跺櫒鐢�(ch菐n)鍝佷腑鏄渶蹇殑銆�
鐒�(w煤)鑸囧€瘮鐨勫彲闈犳€�:
鐢遍珮璩�(zh矛)閲忕殑闆诲瓙绲勪欢鍜岄噰鐢ㄨ€愮敤銆佸皯鍏冨櫒浠剁殑瑷�(sh猫)瑷�(j矛)鐞嗗康锛岄€欎娇瀹冨彲浠ョ稉(j墨ng)鍙楀挤(qi谩ng)灏勯牷鍫�(ch菐ng)鐨勫共鎿�锛屾豢瓒冲叾瀹冮亱(y霉n)杞�(zhu菐n)瑕佹眰锛屽苟鍏锋湁鍚岄鐢�(ch菐n)鍝佷腑鏈€浣崇殑闆堕粸(di菐n)婕傜Щ绌�(w臎n)瀹氭€э紞锛嶄娇鐢ㄨ秴閬�(gu貌)涓€骞�锛岄浂榛�(di菐n)婕傜Щ涓嶅埌婊块噺绋嬬殑0.5%銆傚湪鎶曞叆浣跨敤鐨�25锛�000浠朵互涓婄敘(ch菐n)鍝佷腑锛屽儏鏈変笉鍒�0.5%鐨勭敘(ch菐n)鍝佸湪鍑鸿波涓€骞村収(n猫i)杩斾慨銆�
鏄撲簬闆嗘垚:
鏇挎彌鍏跺畠鍝佺墝锛屽嵆鍙紩鏉剧嵅寰桝rea璩�(zh矛)閲忔祦閲忔帶鍒跺櫒鎵€鍏锋湁鐨勬€ц兘鍜屽彲闈犳€ф柟闈㈢殑鍎�(y艒u)鍕�(sh矛)锛屼笖涓嶆渻(hu矛)閬囧埌瀹夎鏂归潰鐨勯夯鐓�銆傜壒瀹氬瀷铏�(h脿o)鐨勭敘(ch菐n)鍝佸付鏈夋(bi膩o)婧�(zh菙n)闆绘埃鎺ラ牠骞跺叿鏈夎嚚鐣屽昂瀵�锛屽彲杓曟澗瑁濆叆鐝�(xi脿n)鏈夌殑绯荤当(t菕ng)銆�
鍑虹溇鐨勬晥鏋滐細
FC-7700绯诲垪璩�(zh矛)閲忔祦閲忔帶鍒跺櫒甯剁郸鎮ㄧ殑涓嶅儏鍍呮槸钖勮啘鍜屽埢铦曞伐钘濈殑涓€鑷存€�锛屽悓鏅�(sh铆)閭勬湁楂樺害鐨勫彲閲嶅京(f霉)鎬�銆�
鍨嬭櫉(h脿o)鍙冩暩(sh霉)锛�
|
椤炲垾
|
FC-7700銆�7700C銆�7700CD銆�7700CU
|
FC-7710銆�7710C銆�7710CD銆�7710CU
|
FC-7720銆�7720C銆�7720CD
|
|
婊块噺绋嬭寖鍦�
|
10sccm鍒�5slm
|
6鍒�20slm
|
35鍒�150slm
|
|
20鍒�50slm
|
|
闊挎噳(y墨ng)鏅�(sh铆)闁�
|
鍒伴仈(d谩)瑷�(sh猫)瀹氶粸(di菐n)±2%鎵€闇€鏅�(sh铆)闁�<2绉�
|
鍒伴仈(d谩)瑷�(sh猫)瀹氶粸(di菐n)±2%鎵€闇€鏅�(sh铆)闁�<3绉�
|
|
绮惧害
|
婊块噺绋�±1%鑼冨湇鍏�(n猫i)
|
婊块噺绋�±2%鑼冨湇鍏�(n猫i)
|
|
绶氭€у害
|
婊块噺绋�±0.5%鑼冨湇鍏�(n猫i)
|
婊块噺绋�±0.5%鑼冨湇鍏�(n猫i)
|
婊块噺绋�±1%鑼冨湇鍏�(n猫i)
|
|
婊块噺绋�±1%鑼冨湇鍏�(n猫i)
|
|
閲嶅京(f霉)绮惧害
|
婊块噺绋�±0.2%鑼冨湇鍏�(n猫i)
|
|
婕忕巼
|
鏈€澶у€�1×10-6 atm-cc/绉�(姘�)
|
|
鎺у埗鑼冨湇
|
婊块噺绋嬬殑5鍒�100%
|
|
澹撳樊
|
7鑷�40 psi
|
10鑷�40 psi(517鑷�2069鎵�)
|
21鑷�40 psi(1086鑷�2069鎵�)
|
|
(362鑷�2069鎵�)
|
14鑷�40 psi(724鑷�2069鎵�)
|
|
姝ｅ父宸ヤ綔澹撳姏
|
50 psi(2586鎵�)
|
|
鏈€澶у叆鍙ｅ鍔�
|
鏈€澶у€�150 psi(7740鎵�)
|
|
婧害鑼冨湇
|
5鑷�45鈩�
|
娉細鍙牴鎿�(j霉)涓嶅悓瀹㈡埗鐨勯渶姹�锛岄伕鎿囧叏閲戝爆瀵嗗皝鐨凢C-7800CD绯诲垪锛屾暩(sh霉)瀛楀瀷鐨凢C-D770绯诲垪锛屽叏閲戝爆瀵嗗皝鍙婃暩(sh霉)瀛楀瀷鐨凢C-D980绯诲垪銆�
FC-7800_妯℃摤閲戝爆瀵嗗皝璩�(zh矛)閲忔祦閲忔帶鍒跺櫒
妯℃摤閲戝爆瀵嗗皝; 娴侀噺鑼冨湇:10 sccm-5 slm; 绮惧害:≤±1% FS ; 鏈€澶ч€�(j矛n)姘ｅ鍔�:140 psi(981 kPa)
FC-D980_鏁�(sh霉)瀛楀紡閲戝爆瀵嗗皝璩�(zh矛)閲忔祦閲忔帶鍒跺櫒
鏁�(sh霉)瀛楀紡閲戝爆瀵嗗皝; 娴侀噺鑼冨湇:10 sccm-5 slm; 绮惧害:≤±1% of set point(25%-100% FS);≤±0.25% FS (2%-25% FS); 鏈€澶у伐浣滃鍔�:70 psig(490 kPag)
|
