B950_灏嶅鍔涘拰婧害涓嶆晱鎰熺殑璩�(zh矛)閲忔祦閲忔帶鍒跺櫒(30C51L)

妯℃摤寮�;

娴侀噺鑼冨湇:3 sccm-50 slpm;

娴侀噺绮惧害:±0.7% of rate (10-100% FS);±0.07% FS(<10% FS);

闁ラ杸椤炲瀷:闁ラ杸甯搁枆

瑷堥噺鍠綅锛氳嚭
鐢�(ch菐n)鍦帮細缇庡湅
浜よ波鍛ㄦ湡锛�6鍛�
淇濇湡锛氫竴骞�
椹楁敹妯�(bi膩o)婧�(zh菙n)锛歄EM妯�(bi膩o)婧�(zh菙n)
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